Auto-Match Matching Unit is designed to match a Plasma Chamber or CO2-laser system to an RF power generator with its nominal output impedance of 50 Ohm. Auto-Match Matching Unit are designed to match the Plasam Chamber to RF power generator frequency range from 1MHz to 81MHz, power range from 100W to 10kW。
Auto-Match matching Unit have the following series such as Auto-Match 600, Auto-Match 1500, Auto-Match 5000. Auto-Match 600 and Auto-Match 1500 are desined to be force air and water cooling, accocrding to the customer application. Auto-Match 5000 and higher power are commended to be water cooling.
Auto-Match matching Unit can be operated in auto and manual mode, customers can use the Auto/Manual switch to select the desired mode or can use Analog I/O connector to control the Auto-Match Matching Unit.
Auto-Match Matching Unit employ optimized arithmetic to adjust the spped of the tuning components and can avoid the interfer between diffrent Matching Unit in the system during thee application in PECVD, so as to introduce faster and more accurate matching to improve the stability and life of the matching unit.
Generator Research Technologies Ltd. have technical engineer to provide professional consult to our customer during the selection of product and application, and makre sure that customer can operate the Auto-Match matching unit effectively.
Our R&D engineering provide the special Auto-Match Matchnig Unit frequency range from 1MHz to 250MHz according to the specification of our customer.
Auto-Match Matching Unit has the following types:
Auto-Match 0613 13.56MHz 600W
Auto-Match 1513 13.56MHz 1500W
Auto-Match 5013 13.56MHz 5000W
Auto-Match 0627 27.12MHz 600W
Auto-Match 1527 27.12MHz 1500W
Auto-Match 3027 27.12MHz 3000W
Auto-Match 2040 40.68MHz 2000W
Auto-Match 5040 40.68MHz 5000W
Auto-Match 2060 60MHz 2000W
Auto-Match 2081 81MHz 2000W
